JPH0451771B2 - - Google Patents

Info

Publication number
JPH0451771B2
JPH0451771B2 JP7921387A JP7921387A JPH0451771B2 JP H0451771 B2 JPH0451771 B2 JP H0451771B2 JP 7921387 A JP7921387 A JP 7921387A JP 7921387 A JP7921387 A JP 7921387A JP H0451771 B2 JPH0451771 B2 JP H0451771B2
Authority
JP
Japan
Prior art keywords
laser
laser beam
beam splitter
electrical signal
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7921387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63243819A (ja
Inventor
Masayoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP7921387A priority Critical patent/JPS63243819A/ja
Publication of JPS63243819A publication Critical patent/JPS63243819A/ja
Publication of JPH0451771B2 publication Critical patent/JPH0451771B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP7921387A 1987-03-31 1987-03-31 微小振動測定装置 Granted JPS63243819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7921387A JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Publications (2)

Publication Number Publication Date
JPS63243819A JPS63243819A (ja) 1988-10-11
JPH0451771B2 true JPH0451771B2 (en]) 1992-08-20

Family

ID=13683655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7921387A Granted JPS63243819A (ja) 1987-03-31 1987-03-31 微小振動測定装置

Country Status (1)

Country Link
JP (1) JPS63243819A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285898A (ja) * 2006-04-17 2007-11-01 Tokai Univ レーザ振動計

Also Published As

Publication number Publication date
JPS63243819A (ja) 1988-10-11

Similar Documents

Publication Publication Date Title
US4966459A (en) Broadband optical detection of transient motion from a scattering surface
CA2007190C (en) Laser optical ultrasound detection
US5737085A (en) Precision optical displacement measurement system
US3847485A (en) Optical noncontacting surface sensor for measuring distance and angle of a test surface
US5841125A (en) High energy laser focal sensor (HELFS)
US20090027688A1 (en) Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
JPH0339605A (ja) 光学式表面形状測定装置
JPS62233704A (ja) 差動平面鏡干渉計システム
JPH0451771B2 (en])
US4346999A (en) Digital heterodyne wavefront analyzer
Palmer Ultrasonic surface wave detection by optical interferometry
JPH06186337A (ja) レーザ測距装置
CN115127662A (zh) 基于连续波激光的脉冲激光干涉等效波长校准装置及方法
US5539516A (en) Scanning pulsed profilometer
JPS6355035B2 (en])
JPS6371675A (ja) レ−ザ−測距装置
JPH08178632A (ja) 表面形状測定装置
JPH06221853A (ja) 位置検出装置
JPH0339563B2 (en])
JPH04283603A (ja) 光源に近赤外レ−ザダイオ−ドを用いた光学的測定装置
Nakamura 3P4-6 Optical Interferometric Measurement of Vibration Amplitude in High Power Ultrasonic Tool through Vibration-Synchronized Fringe Counting (II) Simplification of the System
JPS6275363A (ja) レ−ザ−測距装置
JP2942002B2 (ja) 面形状測定装置
SU1696890A1 (ru) Способ измерени амплитуды колебаний и устройство дл его осуществлени
SU1404811A1 (ru) Стабилизированный интерферометр

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees